Influence of methane concentration on the electric transport properties in heavily boron-doped nanocrystalline CVD diamond Films

Materials Research Society Symposium Proceedings

Volumn 1282, Issue , 2011, Pages 87-92

  Janssens, Stoffel D ^a   Pobedinskas, Paulius ^a   Petráková, Vladimíra ^b   Nesládek, Miloš ^a,c   Haenen, Ken ^a,c   Wagner, Patrick ^a,c  

^a HASSELT UNIVERSITY   (Belgium)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; BORON CONCENTRATIONS; BORON-DOPED; CVD DIAMOND FILMS; DISORDERED METALS; ELECTRIC TRANSPORT MEASUREMENTS; ELECTRIC TRANSPORT PROPERTIES; FUSED SILICA SUBSTRATES; GASPHASE; METHANE CONCENTRATIONS; NANOCRYSTALLINE DIAMONDS; NANOCRYSTALLINES; REAL METALS; SINGLE-CRYSTALLINE DIAMOND; TEMPERATURE DEPENDENT;

BORON; DIAMONDS; ELECTRIC PROPERTIES; ELECTRIC VARIABLES MEASUREMENT; FUSED SILICA; GRAIN BOUNDARIES; METHANATION; METHANE; TRANSPORT PROPERTIES;

DIAMOND FILMS;

EID: 80053238148     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2011.454     Document Type: Conference Paper

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