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Volumn 17, Issue 7-9, 2011, Pages 181-185

Local kinetic modeling of aluminum oxide metal-organic CVD from aluminum tri-isopropoxide

Author keywords

Aluminium oxide; Aluminium tri isopropoxide; Kinetics; MOCVD; Modeling

Indexed keywords

ALUMINA DEPOSITION; ALUMINIUM OXIDE; ALUMINUM OXIDES; COMPUTATIONAL FLUID DYNAMICS CODES; EXPERIMENTAL DEPOSITION; GAS TRANSPORT; HETEROGENEOUS KINETICS; KINETIC MODELING; METAL-ORGANIC; NON-UNIFORMITIES; NUMERICAL MODELS; TOTAL PRESSURE;

EID: 80053216661     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201004301     Document Type: Article
Times cited : (15)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.