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Volumn 17, Issue 7-9, 2011, Pages 181-185
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Local kinetic modeling of aluminum oxide metal-organic CVD from aluminum tri-isopropoxide
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Author keywords
Aluminium oxide; Aluminium tri isopropoxide; Kinetics; MOCVD; Modeling
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Indexed keywords
ALUMINA DEPOSITION;
ALUMINIUM OXIDE;
ALUMINUM OXIDES;
COMPUTATIONAL FLUID DYNAMICS CODES;
EXPERIMENTAL DEPOSITION;
GAS TRANSPORT;
HETEROGENEOUS KINETICS;
KINETIC MODELING;
METAL-ORGANIC;
NON-UNIFORMITIES;
NUMERICAL MODELS;
TOTAL PRESSURE;
ALUMINA;
COMPUTATIONAL FLUID DYNAMICS;
DEPOSITION RATES;
ENZYME KINETICS;
KINETICS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MODELS;
ALUMINUM;
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EID: 80053216661
PISSN: 09481907
EISSN: 15213862
Source Type: Journal
DOI: 10.1002/cvde.201004301 Document Type: Article |
Times cited : (15)
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References (14)
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