Aluminium tri-iso-propoxide: Shelf life, transport properties, and decomposition kinetics for the low temperature processing of aluminium oxide-based coatings

Surface and Coatings Technology

Volumn 201, Issue 22-23 SPEC. ISS., 2007, Pages 9159-9162

  Sovar, M M ^a   Samelor D ^a   Gleizes, A N ^a   Vahlas, C ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Aluminium tri iso propoxide; Amorphous alumina; Infra red spectroscopy; Kinetics; MOCVD; Thermal analysis

Indexed keywords

ALUMINA; AMORPHOUS MATERIALS; COATINGS; KINETICS; PRESSURE MEASUREMENT; PYROLYSIS; VAPOR PRESSURE;

ALUMINUM OXIDE-BASED COATINGS; ALUMINUM TRI-ISO-PROPOXIDE; AMORPHOUS ALUMINA; DECOMPOSITION KINETICS; PYROLYTIC DECOMPOSITION;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

ALUMINA; AMORPHOUS MATERIALS; COATINGS; KINETICS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PRESSURE MEASUREMENT; PYROLYSIS; VAPOR PRESSURE;

EID: 34547656343     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.04.063     Document Type: Article

References (24)

1. Samélor D., Sovar M.M., Stefanescu A., Gleizes A.N., Alphonse P., and Vahlas C. In: Devi A., Fischer R., Parala H., Allendorf M., and Hitchmann M. (Eds). Fifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15), Vol. PV 2005-09 (2005), The Electrochemical Society, Inc., Pennington, NJ, USA 1051
2. Gleizes A.N., Sovar M.-M., Samélor D., and Vahlas C. Adv. Sci. Technol. 45 (2006) 1184
3. Gleizes A.N., Vahlas C., Sovar M.-M., Samélor D., and Lafont M.-C. Chem. Vap. Depos. 13 (2006) 23
4. M.-M. Sovar, Thèse de Doctorat d'Université, Institut National Polytechnique de Toulouse, 2006.
5. Bradley D.C. Nature 182 (1958) 1211
6. Bradley D.C. Metal Alkoxides (1959), Interscience Publishers, Inc., New York, N.Y.
7. Bradley D.C. Philos. Trans. R. Soc. Lond., A 330 (1990) 167
8. Bradley D.C., Mehrotra R.C., Rothwell I.P., and Singh A. Alkoxo Aryloxo Derivatives of Metals (2001), Academic Press, London, U. K.
9. Turova N.Y., Kozunov V.A., Yanovskii A.I., Bokii N.G., Struchkov Y.T., and Tarnopol'skii B.L. J. Inorg. Nucl. Chem. 41 (1979) 5
10. Turova N.Y., Turevskaya E.P., Kessler V.G., and Yanovskaya M.I. The Chemistry of Metal Alkoxides (2002), Kluwer Academic Publisher, Dordrecht, The Netherlands
11. Daasch L.W., and Fales H.M. Org. Mass Spectrom. 2 (1969) 1043
12. Fieggen W., Gerding H., and Nibbering N.M.M. Rec. Trav. Chim. 87 (1968) 377
13. Brown L.M., and Mazdiyasni K.S. Anal. Chem. 41 (1969) 1243
14. Mehrotra R.C., Singh A., and Sharma M. J. Indian Chem. Soc. 80 (2003) 499
15. Shulman G.P., Trusty M., and Vickers J.H. J. Org. Chem. 28 (1963) 907
16. Yoshikawa N., Takamura S., Taniguchi S., and Kikuchi A. Trans. Mater. Res. Soc. Jpn. 24 (1999) 151
17. R. W. J. Morssinkhof, Ph.D. Thesis, University of Twente, Netherlands, 1991.
18. Mehrotra R.C. J. Indian Chem. Soc. 30 (1953) 585
19. Wilhoit R.C. J. Phys. Chem. 61 (1957) 114
20. Bleyerveld R.H.T., Fieggen W., and Gerding H. Rec. Trav. Chim. 91 (1972) 477
21. Sladek K.J., and Gibert W.W. In: Glaski F.A. (Ed). Third International Conference on Chemical Vapor Deposition vol. 1 (1972), American Nuclear Society, Salt Lake City, Utah 215
22. Kirk-Othmer. Encyclopedia of Chemical Technology (1969)
23. Belstein. Handbuch der Organischen Chemie (1958)
24. Cameron D.C., Irving L.D., Jones G.R., and Woodward J. Thin Solid Films 91 (1982) 339