Non-lithographically microfabricated capacitive pressure sensor for biomedical applications

Electronics Letters

Volumn 47, Issue 18, 2011, Pages 1015-1017

  Brox, D ^a   Mohammadi, A R ^a   Takahata, K ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL APPLICATIONS; CAPACITIVE PRESSURE SENSORS; FABRICATED DEVICE; GAUGE PRESSURE; IN-VIVO; LINEAR RESPONSE; METAL SUBSTRATE; MICRO ELECTRO-DISCHARGE MACHINING; MICROFABRICATED; MICROMACHINED; PARYLENE MEMBRANES; PHOTOLITHOGRAPHIC PROCESS; SENSING APPLICATIONS; SHALLOW CAVITIES; TEMPERATURE COEFFICIENT; THERMAL BONDING;

BIOCOMPATIBILITY; FABRICATION; MEDICAL APPLICATIONS; PARTIAL PRESSURE SENSORS; PHOTOLITHOGRAPHY; STAINLESS STEEL;

PRESSURE SENSORS;

EID: 80053062369     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el.2011.2230     Document Type: Article

References (10)

1. Eaton, W.P., and Smith, J.H.: ' Micromachined pressure sensors: review and recent development ', Smart Mater. Struct., 1997, 6, p. 530-539 10.1088/0964-1726/6/5/004 0964-1726 (Pubitemid 127655962)
2. Chavan, A.V., and Wise, K.D.: ' Batch-processed vacuum-sealed capacitive pressure sensors ', J. Microelectromech. Syst., 2001, 10, (4), p. 580-588 10.1109/84.967381 1057-7157 (Pubitemid 33149201)
3. Pedersen, T., Fragiacomo, G., Hansen, O., and Thomsen, E.V.: ' Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance ', Sens. Actuators A, Phys., 2009, 154, (1), p. 35-41 10.1016/j.sna.2009.07.013 0924-4247
4. Voskerician, G., Shive, M.S., Shawgo, R.S., Recum, H.V., Anderson, J.M., Cima, M.J., and Langer, R.: ' Biocompatibility and biofouling of MEMS drug delivery devices ', Biomaterials, 2003, 24, (11), p. 1959-1967 10.1016/S0142-9612(02)00565-3 0142-9612 (Pubitemid 36297040)
5. Lee, D.W., and Choi, Y.S.: ' A novel pressure sensor with a PDMS diaphragm ', Microelectron. Eng., 2008, 85, (5-6), p. 1054-1058 10.1016/j.mee.2008.01.074 0167-9317
6. Chang, S.P., and Allen, M.G.: ' Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate ', Sens. Actuators A, Phys., 2004, 116, (2), p. 195-204 10.1016/j.sna.2004.04.010 0924-4247
7. Chen, P.J., Rodger, D.C., Saati, S., Humayun, M.S., and Tai, Y.C.: ' Microfabricated implantable parylene-based wireless passive intraocular pressure sensors ', J. Microelectromech. Syst., 2008, 17, (6), p. 1342-1351 10.1109/JMEMS.2008.2004945 1057-7157
8. Ziegler, D., Suzuki, T., and Takeuchi, S.: ' Fabrication of flexible neural probes with built-in microfluidic channels by thermal bonding of parylene ', J. Microelectromech. Syst., 2006, 15, (6), p. 1477-1482 10.1109/JMEMS.2006. 879681 1057-7157 (Pubitemid 44921765)
9. Ko, W.H., and Wang, Q.: ' Touch mode capacitive pressure sensors ', Sens. Actuators A, Phys., 1999, 75, (3), p. 242-251 10.1016/S0924-4247(99)00069-2 0924-4247
10. Licari, J.J.: ' Coating materials for electronic applications ', (William Andrew Publishing, Norwich, NY, 2003)