A novel pressure sensor with a PDMS diaphragm

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1054-1058

  Lee, Dong Weon ^a   Choi, Young Soo ^a  

^a MEMS   (South Korea)

Author keywords

Carbon fibre; Dielectrophoresis; PDMS; Pressure sensor

Indexed keywords

COMPUTER SIMULATION; DEFORMATION; ELASTIC MODULI; POLYDIMETHYLSILOXANE; PRESSURE SENSORS; SILICON;

LOW PRESSURE; SILICON DIAPHRAGMS; STRAIN CHANGE;

DIAPHRAGMS;

EID: 44149098304     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.074     Document Type: Article

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