Towards 17 μm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8012, Issue , 2011, Pages

  Ericsson, Per ^a   Fischer, Andreas C ^b   Forsberg, Fredrik ^b   Roxhed, Niclas ^b   Samel, Björn ^a   Savage, Susan ^a   Stemme, Göran ^b   Wissmar, Stanley ^a   Öberg, Olof ^a   Niklaus, Frank ^b  

^a ACREO AB   (Sweden)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Bolometers; Focal plane arrays; Heterogeneous integration; Quantum wells; SiGe; Uncooled IR

Indexed keywords

FOCAL PLANE; HETEROGENEOUS INTEGRATION; QUANTUM WELL; SIGE; UN-COOLED IR;

AMORPHOUS SILICON; BOLOMETERS; FOCUSING; INFRARED DETECTORS; INFRARED IMAGING; INFRARED RADIATION; INTEGRATION; PIXELS; PUMPS; SENSORS; SIGNAL TO NOISE RATIO; TECHNOLOGY; THERMISTORS; VANADIUM; VANADIUM COMPOUNDS;

SEMICONDUCTOR QUANTUM WELLS;

EID: 80053031139     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.883827     Document Type: Conference Paper

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