Ion beam machining error control and correction for small scale optics

Applied Optics

Volumn 50, Issue 27, 2011, Pages 5221-5227

  Xie, Xuhui ^a   Zhou, Lin ^a   Dai, Yifan ^a   Li, Shengyi ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR COMPENSATION; ERRORS; IONS; ITERATIVE METHODS; MACHINE COMPONENTS;

COMPENSATION METHOD; COMPUTER CONTROLLED OPTICAL SURFACING; ION BEAM FIGURING; ION BEAM MACHINING; MACHINE PRECISION; MATERIAL REMOVAL RATE; OPTICAL COMPONENTS; POSITIONING ERROR;

ION BEAMS;

EID: 80052979878     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.50.005221     Document Type: Article

References (4)

1. S. C. Fawcett, "Development of an ion beam figuring system for centimeter scale optical components," Proc. SPIE 2263, 164-167 (1994).
2. P. M. Shanbhag, M. R. Feinberg, G. Sandri, M. N. Horenstein, and T. G. Bifano, "Ion-beam machining of millimeter scale optics," Appl. Opt. 39, 599-611 (2000).
3. T. Franz and T. Hänsel, "Ion beam figuring (IBF) solutions for the correction of surface errors of small high performance optics," in Optical Fabrication and Testing, OSA Technical Digest (Optical Society of America, 2008), paper OThC7.
4. X. Xie, W. Gu, and L. Zhou, "Study on machining small precision optical component using thin ion beam," Guofang Keji Daxue Xuebao [Journal of National University of Defense Technology 31, 10-14 (2009), in Chinese.