Study on machining small precision optical component using thin ion beam

Guofang Keji Daxue Xuebao/Journal of National University of Defense Technology

Volumn 31, Issue 4, 2009, Pages 10-14

  Xie, Xu Hui ^a   Gu, Wen Hua ^a   Zhou, Lin ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

Ion beam figuring; Middle high frequency; Polishing; Surface error

Indexed keywords

HIGH FREQUENCY; HIGH SPATIAL FREQUENCY; ION BEAM FIGURING; LOW-SPATIAL FREQUENCY; MIDDLE-HIGH FREQUENCY; OPTICAL COMPONENTS; OPTICAL MANUFACTURING; OPTICAL TECHNOLOGY; PRECISION OPTICS; SMALL SCALE; SPATIAL FREQUENCY; SURFACE ERROR;

COMPUTER SIMULATION; ION BEAMS; ION BOMBARDMENT; IONS; POLISHING;

BEAM PLASMA INTERACTIONS;

EID: 70349403914     PISSN: 10012486     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. Barkat R. The Influence of Random Wavefront Errors on the Imaging Characteristics of an Optical System[J]. Optica Acta, 1971(18): 683-694.
2. Jones R A, Rupp W J. Rapid Optical Fabrication with CCOS[J]. SPIE, 1990, 1333: 34.
3. Kordonsky W I, Jacobs S D. Magnetorheological Finishing[J]. International Journal of Modern Physics B, 1996(10): 2837-2848.
4. Walker D D, et al. The 'Precessions' Tooling for Polishing and Figuring Flat, Spherical and Aspheric Surfaces[J]. Opt. Express, 2003(11): 958-964.
5. Allen L N, Keim R E. An Ion Figuring System for Large Optic Fabrication[J]. SPIE, 1989, 1168: 33-50.
6. Fruit M, Schindler A, Hansel T. Ion Beam Figuring of SiC Mirrors Provides Ultimate WFE Performances for Any Type of Telescope[J]. SPIE, 1999, 3739: 142-154.
7. Jun T, et al. Surface Roughness of Optical Substrate Finished by Ion Beam Figuring[C]//EUV Symposium, 2003.
8. Zhou L, et al. Analysis of Correcting Ability of Ion Beam Figuring[J]. Key Engineering Materials, 2008, 364: 470-475.
9. 2008.
10. Haensel T, et al. Deterministic Ion Beam Figuring of Surface Errors in the Sub-millimeter Spatial Wavelength Range[C]//6th EUSPEN intl. conf, Baden, Vienna, Austria, 2006.
11. Zhou L, et al. Ion Beam Figuring System in NUDT[J]. SPIE, 2007, 6722: 67224A1-6.