Ion-beam machining of millimeter scale optics

Applied Optics

Volumn 39, Issue 4, 2000, Pages 599-611

  Shanbhag, Prashant M ^a   Feinberg, Michael R ^a   Sandri, Guido ^a   Horenstein, Mark N ^a   Bifano, Thomas G ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042188329     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.000599     Document Type: Article

References (16)

1. S. R. Wilson and J. R. McNeil, “Neutral ion beam figuring of large optical surfaces,” in Current Developments in Optical EngineeringII, R. E. Fischer and W. J. Smith, eds., Proc. SPIE 818, 320-324 (1987).
2. S. R. Wilson, D. W. Reicher, and J. R. McNeil, “Surface figuring using neutral ion beams,” in Advances in Fabrication and Metrology for Optics and Large Optics, J. B. Arnold and R. E. Parko, eds., Proc. SPIE 966, 74-81 (1988).
3. L. N. Allen and R. E. Keim, “An ion figuring system for large optic fabrication,” in Current Developments in Optical Engineering and Commercial Optics, R. E. Fischer, H. M. Pallicove, and W. J. Smith, eds., Proc. SPIE 1168, 33-50 (1989).
4. L. N. Allen and H. W. Romig, “Demonstration ofan ion figuring process,” in Advanced Optical Manufacturing and Testing, L. R. Baker, P. B. Reid, and G. M. Sanger, eds., Proc. SPIE 1333, 22-33 (1990).
5. L. N. Allen, J. J. Hannon, and R. W. Wambach, “Final surface error correction of an off-axis aspheric petal by ion figuring,” in Active and Adaptive Optical Components, M. A. Ealey, ed., Proc. SPIE 1543, 190-200 (1991).
6. L. N. Allen, R. E. Keim, and T. S. Lewis, “Surface error correction of a Keck 10-m telescope primary mirror segment by ion figuring,” in Advanced Optical Manufacturing and Testing II, V. J. Doherty, ed., Proc. SPIE 1531, 195-204 (1991).
7. D. Pileri, “Large optics fabrication: technology drivers and new manufacturing techniques,” in Current Developments in Optical Engineering and Commercial Optics, R. E. Fischer, H. M. Pallicove, and W. J. Smith, eds., Proc. SPIE 1168, 25-32 (1989).
8. J. Lubliner and J. E. Nelson, “Stressed mirror polishing: a technique for producing nonaxisymmetric mirrors,” Appl. Opt. 19, 2332-2340 (1980).
9. T. W. Drueding, S. C. Fawcett, S. R. Wilson, and T. G. Bifano, “Neutral ion figuring of CVD SiC,” Opt. Eng. 33, 967-974 (1994).
10. T. W. Drueding, S. C. Fawcett, S. R. Wilson, and T. G. Bifano, “Ion beam figuring of small optical components,” Opt. Eng. 34, 3565-3571 (1995).
11. T. W. Drueding, S. C. Fawcett, and T. G. Bifano, “Contouring algorithm for ion figuring,” Precis. Eng. 17, 10-12 (1995).
12. T. W. Drueding, “Precision ion figuring system for optical components,” Ph.D. dissertation (Boston University, Boston, 1995).
13. C. L. Carnal, C. M. Egert, and K. Y. Hylton, “Advanced matrix-based algorithm for ion beam milling of optical components,” in Current Developments on Optical Design and Optical Engineering II, R. E. Fischer and W. J. Smith, eds., Proc. SPIE 1752, 54-62 (1992).
14. M. Born and E. Wolf, Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light (Cambridge U Press, New York, 1998).
15. B. Wolf, Handbook of Ion Sources (CRC Press, Boca Raton, Fla., 1995).
16. T. G. Bifano, R. Mali, J. Perreault, K. Dorton, N. Vandelli, M. Hornstein, and D. Castaüon, “Continuous membrane surface micromachined silicon deformable mirror,” Opt. Eng. 36, 1354-1360 (1997).