An experimental study on the influences of air change rate and free area ratio of raised-floor on cleanroom particle concentrations

Building and Environment

Volumn 48, Issue 1, 2012, Pages 84-88

  Khoo, Chun Yong ^a   Lee, Chung Chieh ^a   Hu, Shih Cheng ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Cleanroom airflow; Free area of raised floor; Measured air change rate; Particle concentration

Indexed keywords

AIR CHANGE RATES; AIR FLOW-RATE; AREA RATIOS; CLEANROOM FACILITIES; EXPERIMENTAL DATA; EXPERIMENTAL INVESTIGATIONS; EXPERIMENTAL STUDIES; FREE AREA OF RAISED FLOOR; MEASURED AIR CHANGE RATE; PARTICLE CONCENTRATION; PARTICLE CONCENTRATIONS; ROOM AIR; THEORETICAL BASIS; VENTILATION SYSTEMS;

CONCENTRATION (PROCESS); FLOORS; LABORATORIES; VENTILATION;

CLEAN ROOMS;

AIRFLOW; BUILDING; EXPERIMENTAL STUDY; INDOOR AIR; PARTICLE SIZE; VENTILATION;

EID: 80052762569     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2011.09.001     Document Type: Article

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