Development of cleanroom required airflow rate model based on establishment of theoretical basis and lab validation

ASHRAE Transactions

Volumn 116 PART 1, Issue , 2010, Pages 87-97

  Sun, Wei ^a   Mitchell, John ^b   Flyzik, Keith ^c   Hu, Shih Cheng ^d   Liu, Junjie ^e   Vijayakumar, R ^f   Fukuda, Hiro ^g  

^a Engsysco Inc   (United States)

^b Particle Measuring Systems Inc   (United States)

^c Micro Clean Inc   (United States)

^d NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^e TIANJIN UNIVERSITY   (China)

^f Aerfil LLC   (United States)

^g Kanomax USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR CONDITIONING; CLEAN ROOMS; ENERGY CONSERVATION;

AIR CHANGE RATES; CLEANROOM FACILITIES; CRITICAL VARIABLES; FILTER EFFICIENCY; GOOD CORRELATIONS; PARTICLE GENERATION; QUANTITATIVE METHODOLOGY; THEORETICAL MODELING;

LABORATORIES;

EID: 77954289322     PISSN: 00012505     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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