SCOPUS 정보 검색 플랫폼

Nanotechnology

Volumn 22, Issue 39, 2011, Pages

Large-scale ordered silicon microtube arrays fabricated by Poisson spot lithography

(6) Tian, Shibing a Xia, Xiaoxiang a Sun, Wangning a Li, Wuxia a Li, Junjie a Gu, Changzhi a

a INSTITUTE OF PHYSICS (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAY STRUCTURES; DEEP ETCHING; EXPOSURE DOSE; EXTERIOR SURFACES; LOW COSTS; MASK PATTERNS; MEDICAL DEVICES; MICRO-TUBES; MICROSCOPIC ANALYSIS; MICROTUBE ARRAYS; ORDERED RING; PATTERN GEOMETRY; POTENTIAL APPLICATIONS; RING PATTERNS; SI SUBSTRATES;

BIOMEDICAL ENGINEERING; MASKS; PHOTOLITHOGRAPHY;

SILICON;

NANOMATERIAL; SILICON;

ARTICLE; CHEMISTRY; METHODOLOGY; NANOTECHNOLOGY; SURFACE PROPERTY; ULTRASTRUCTURE;

NANOSTRUCTURES; NANOTECHNOLOGY; SILICON; SURFACE PROPERTIES;

EID: 80052551546 PISSN: 09574484 EISSN: 13616528 Source Type: Journal
DOI: 10.1088/0957-4484/22/39/395301 Document Type: Article

Times cited : (16)

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