Fabrication and characterization of a vertical lamination micromixer for mid-IR spectroscopy

Sensors and Actuators, B: Chemical

Volumn 159, Issue 1, 2011, Pages 336-341

  Buchegger, Wolfgang ^a   Wagner, Christoph ^a   Svasek, Peter ^a   Lendl, Bernhard ^a   Kraft, Martin ^b   Vellekoop, Michael J ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b CTR CARINTHIAN TECH RESEARCH AG   (Austria)

Author keywords

Lamination mixer; Microfabrication; Micromixer; Mid IR spectroscopy; Passive mixing

Indexed keywords

CHIP HANDLING; CONTROLLED PROCESS; CUSTOM CHIPS; DIFFUSION LENGTH; FLUID SIMULATIONS; HIGH DYNAMIC RANGE; HIGH UNIFORMITY; HIGH YIELD; INFRARED MEASUREMENTS; LAMINATION MIXER; MEASUREMENT RESULTS; MICRO MIXERS; MID-IR SPECTROSCOPY; MIXING PERFORMANCE; MIXING TIME; PASSIVE MIXING; SILICON MICROMACHINING; SPECTRAL RANGE; TIME RANGE; TIME RESOLVED INFRARED SPECTROSCOPY; ULTRA-FAST;

FABRICATION; INFRARED SPECTROSCOPY; LAMINATING; MICROMACHINING; MIXING; REACTION KINETICS;

MIXERS (MACHINERY);

EID: 80052333223     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.06.083     Document Type: Article

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