Fabrication of microfluidic devices based on glass-PDMS-glass technology

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1265-1269

  Plecis, Adrien ^a   Chen, Yong ^a  

^a CNRS   (France)

Author keywords

Bonding technology; EOF; Microfluidics; Moulding technique; PDMS etching; Soft lithography

Indexed keywords

ELECTROOSMOSIS; LITHOGRAPHY; MICROCHANNELS; MICROFABRICATION; NANOTECHNOLOGY; PLASMA CONFINEMENT;

LATERAL FLUID CONFINEMENTS; MICROFLUIDIC DEVICES; PDMS;

MICROFLUIDICS;

EID: 34247625111     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.276     Document Type: Article

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