Deposition of silica thin films formed by sol-gel method

Journal of Sol-Gel Science and Technology

Volumn 54, Issue 2, 2010, Pages 249-257

  Guleryuz, Hasan ^a   Kaus, Ingeborg ^b   Filiàtre, Claudine ^c   Grande, Tor ^a   Einarsrud, Mari Ann ^a  

^a NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

^b SINTEF MATERIALS AND CHEMISTRY   (Norway)

^c UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

Deposition kinetics; Gravimetry; Silica; Sol gel; Thin film

Indexed keywords

AGGLOMERATION; GRAVIMETRIC ANALYSIS; NANOPARTICLES; SILICA; SILICON WAFERS; SOL-GEL PROCESS; SOL-GELS; THIN FILMS;

DEPOSITION KINETICS; MASS MEASUREMENTS; MONOLAYER COVERAGE; PARTICLE CONCENTRATIONS; RATE OF DEPOSITION; SALT CONCENTRATION; SILICA NANOPARTICLES; SILICA THIN FILMS;

DEPOSITION;

EID: 80052183747     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-010-2190-0     Document Type: Article

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