Active CMOS-MEMS conductive probes and arrays for tunneling-based atomic-level surface imaging

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2446-2449

  Zhang, Y ^a   Wang, J ^a   Santhanam, S ^a   Fedder, G K ^a,b,c  

^a Department of Electrical and Computer Engineering ^*  (United States)

^b Institute for Complex Engineered Systems   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

CMOS MEMS; probe array; SPM; thermal actuation

Indexed keywords

ACTIVE PROBE; ATOMIC LEVELS; ATOMIC-LEVEL RESOLUTION; BEAM DEPOSITION; CMOS-MEMS; CONDUCTIVE PROBE; MEMS PROBES; NANOSTRUCTURE FORMATION; PROBE ARRAY; SCANNING TUNNELING MICROSCOPY (STM); SPINDT TIP; SPM; SURFACE IMAGING; THERMAL ACTUATION; TRANSIMPEDANCE AMPLIFIERS;

ACTUATORS; CHEMICAL MODIFICATION; DIFFERENTIAL AMPLIFIERS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PROBES; SCANNING TUNNELING MICROSCOPY;

SOLID-STATE SENSORS;

EID: 80052108250     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969662     Document Type: Conference Paper

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