A pressure programmable gas chromatography microsystem utilizing motionless Knudsen pump, fiber-integrated optical detector, and silicon micromachined separation column

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 803-806

  Liu, Jing ^a   Gupta, Naveen K ^a   Fan, Xudong ^a   Wise, Kensall D ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

chemical sensing; Environmental health monitoring; Fabry P rot optical detector; free molecular flow regime; Knudsen pump; optical detector; transitional flow regime

Indexed keywords

CHEMICAL SENSING; ENVIRONMENTAL HEALTH; FLOW REGIMES; KNUDSEN PUMP; OPTICAL DETECTORS; TRANSITIONAL FLOW REGIMES;

ACTUATORS; COLUMN CHROMATOGRAPHY; DETECTORS; GAS CHROMATOGRAPHY; MICROSYSTEMS; OPTICAL FIBERS; PARAFFINS; SOLID-STATE SENSORS; VACUUM PUMPS;

OPTICAL PUMPING;

EID: 80052105323     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969291     Document Type: Conference Paper

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