Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2614-2617

  Barnes, A C ^a   Roberts, R C ^a   Tien, N C ^a   Zorman, C A ^a   Feng, Philip X L ^a  

^a Case Western Reserve University   (United States)

Author keywords

Membrane; Nanoelectromechanical Systems; Resonator; Silicon Carbide (SiC); Vibrational Modes

Indexed keywords

EFFICIENT DETECTION; HIGH ASPECT RATIO; HIGH-Q MODES; IN-VACUUM; NANO ELECTROMECHANICAL SYSTEMS; NANOMECHANICAL RESONATORS; NONLINEAR EFFECT; OPTICAL INTERFEROMETRY; RADIO FREQUENCIES; RESONANCE SPECTRUM; ROOM TEMPERATURE; SQUARE MEMBRANES; VIBRATIONAL MODES;

ACTUATORS; ASPECT RATIO; MEMBRANES; MICROSYSTEMS; RESONANCE; RESONATORS; SOLID-STATE SENSORS;

SILICON CARBIDE;

EID: 80052104787     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969837     Document Type: Conference Paper

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