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Volumn , Issue , 2010, Pages 393-398

Electrochemical machining of micro-profile on copper

Author keywords

EMM; Micro channel; Regression analysis

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC DISCHARGE MACHINING; ELECTROCHEMICAL CUTTING; ELECTROLYTES; MICROMACHINING; REGRESSION ANALYSIS;

EID: 79961192096     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (9)
  • 2
    • 0027553803 scopus 로고
    • Anodic dissolution of metals at high rates
    • Datta, M., 1993, Anodic Dissolution of Metals at High Rates, IBM Journal of Research and Development, 37/2: 207-225.
    • (1993) IBM Journal of Research and Development , vol.37 , Issue.2 , pp. 207-225
    • Datta, M.1
  • 3
    • 0032162749 scopus 로고    scopus 로고
    • Microfabrication by electrochemical metal removal
    • Datta, M., 1998, Microfabrication by Electrochemical Metal Removal, IBM J. of Research and Development, 37:655-669.
    • (1998) IBM J. of Research and Development , vol.37 , pp. 655-669
    • Datta, M.1
  • 4
    • 21044456890 scopus 로고    scopus 로고
    • Micro - ECM for production of microsystems with a high aspect ratio
    • Forster, R., Schoth, A., Menz, W., 2005, Micro - ECM for Production of Microsystems with a High Aspect Ratio, Microsystem Technologies, 11:246-249.
    • (2005) Microsystem Technologies , vol.11 , pp. 246-249
    • Forster, R.1    Schoth, A.2    Menz, W.3
  • 9
    • 0042970310 scopus 로고    scopus 로고
    • Electrochemical micromachining with ultrashort voltage pulses-a versatile method with lithographic precision
    • Kock, M., Kirchner, V., Schuster, R., 2003, Electrochemical Micromachining with Ultrashort Voltage Pulses-A Versatile Method with Lithographic Precision, Electrochimica Acta, 48:3213-3219.
    • (2003) Electrochimica Acta , vol.48 , pp. 3213-3219
    • Kock, M.1    Kirchner, V.2    Schuster, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.