Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation

Electrochimica Acta

Volumn 56, Issue 28, 2011, Pages 10701-10707

  Cornut, Renaud ^a   Nunige, Sandra ^a   Lefrou, Christine ^a   Kanoufi, Frédéric ^a  

^a CNRS   (France)

Author keywords

Copper; Etching; Lithography; Model; Scanning Electrochemical Microscopy

Indexed keywords

COPPER; ETCHING; LITHOGRAPHY; MODELS; SCANNING; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY;

EXPERIMENTAL CONDITIONS; EXPERIMENTAL INVESTIGATIONS; FEEDBACK BEHAVIOURS; QUANTITATIVE KINETICS; SCANNING ELECTROCHEMICAL MICROSCOPES; SCANNING ELECTROCHEMICAL MICROSCOPY; THEORETICAL MODELING; TIP-SUBSTRATE SEPARATION;

ANALYTIC EQUIPMENT;

EID: 79960984662     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2011.03.088     Document Type: Conference Paper

References (21)

1. G. Wittstock, M. Burchardt, S.E. Pust, Y. Shen, and C. Zhao Angew. Chem. Int. Ed. 46 2007 1584
2. D. Mandler Scanning Electrochemical Microscopy 1st ed. 2001 Marcel-Dekker New York
3. R. Schuster, V. Kirchner, P. Allongue, and G. Ertl Science 289 2000 98
4. O. deAbril, A. Gündel, F. Maroun, P. Allongue, and R. Schuster Nanotechnology 19 2008 325301
5. G. Lee, H. Jung, J. Son, K. Nam, T. Kwon, G. Lim, Y.H. Kim, J. Seo, S.W. Lee, and D.S. Yoon Nanotechnology 21 2010 185301
6. C. Zhao, M. Burchardt, T. Brinkhoff, C. Beardsley, M. Simon, and G. Wittstock Langmuir 6 2010 8641 and references therein
7. F. Deiss, C. Combellas, C. Frétigny, N. Sojic, and F. Kanoufi Anal. Chem. 82 2010 5169
8. N. Ktari, S. Nunige, A. Azioune, M. Piel, C. Connan, F. Kanoufi, and C. Combellas Chem. Mater. 22 2010 5725
9. D. Mandler, and A.J. Bard J. Electrochem. Soc. 136 1989 3143
10. E.M. El-Giar, R.A. Said, G.E. Bridges, and D.J. Thomson J. Electrochem. Soc. 147 2000 586
11. C. Blanc, N. Pébre, B. Tribollet, and V. Vivier Corros. Sci. 52 2010 991
12. M. Sheffer, and D. Mandler J. Electroanal. Chem. 622 2008 115
13. R. Cornut, and C. Lefrou J. Electroanal. Chem. 621 2008 178
14. J. Kwak, and A.J. Bard Anal. Chem. 61 1989 1221
15. C. Lefrou J. Electroanal. Chem. 592 2006 103
16. R.S. Goncalves, D.S. Azambuja, A.M.S. Lucho, M.P. Reche, and A.M. Schmidt Mater. Res. 4 2001 97
17. H.D. Dewald, P. Parmananda, and R.W. Rollins J. Electroanal. Chem. 306 1991 297
18. D. Mandler, and P.R. Unwin J. Phys. Chem. B 107 2003 407
19. H. Xiong, D.A. Gross, J. Guo, and S. Amemiya Anal. Chem. 78 2006 1946
20. F. Hauquier, J. Ghilane, B. Fabre, and P. Hapiot J. Am. Chem. Soc. 130 2008 2748
21. C. Lefrou, and R. Cornut ChemPhysChem 11 2010 547