Surface evolution of titanium oxide thin film with swift heavy ion irradiation

Radiation Effects and Defects in Solids

Volumn 166, Issue 8-9, 2011, Pages 571-577

  Rath, H ^a   Dash, P ^a   Som, T ^b   Prakash, Jai ^c   Tripathi, A ^d   Avasthi, D K ^d   Singh, U P ^e   Mishra, N C ^a  

^a UTKAL UNIVERSITY   (India)

^b INSTITUTE OF PHYSICS   (India)

^c MMH College   (India)

^d INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^e KIIT UNIVERSITY   (India)

Author keywords

atomic force microscopy; nanoparticles; swift heavy ion irradiation; titanium oxide thin film

Indexed keywords

AVERAGE GRAIN SIZE; FLUENCES; GLANCING ANGLE; GRAIN FRAGMENTATION; GRAIN SIZE; GRAIN SIZE DISTRIBUTION; ION FLUENCES; ION-MATTER INTERACTION; OXIDE NANOPARTICLES; SHI IRRADIATION; SURFACE EVOLUTION; SWIFT HEAVY ION IRRADIATION; SWIFT HEAVY IONS; THERMAL SPIKE MODEL; TITANIUM OXIDE THIN FILM; TITANIUM OXIDE THIN FILMS; TOPOLOGICAL MODIFICATION;

ATOMIC FORCE MICROSCOPY; FILM GROWTH; GRAIN SIZE AND SHAPE; HEAVY IONS; IRRADIATION; NANOPARTICLES; OXIDE FILMS; SIZE DETERMINATION; SIZE DISTRIBUTION; SURFACE TOPOGRAPHY; SURFACES; THIN FILMS; TITANIUM; TITANIUM OXIDES; TOPOGRAPHY; X RAY DIFFRACTION ANALYSIS;

GRAIN GROWTH;

EID: 79960684592     PISSN: 10420150     EISSN: 10294953     Source Type: Journal    
DOI: 10.1080/10420150.2011.559239     Document Type: Conference Paper

References (11)

1. DeLoach, J. D.; Aita, C. R. J. Vac. Sci. Technol. A 1998, 16, 1963-1968.
2. Fleischer, R. L.; Price, P. B.; Walker, R. M. J. Appl. Phys. 1965, 36, 3645-3652.
3. Rath, H.; Dash, P.; Som, T.; Satyam, P. V.; Singh, U. P.; Kulriya, P. K.; Kanjilal, D.; Avasthi, D. K.; Mishra, N. C. J. Appl. Phys. 2009, 105, 074311-1-5.
4. Horcas, I.; Fernandez, R.; Gomez-Rodriguez, J. M.; Colchero, J.; Gomez-Herrero, J.; Baro, A. M. Rev. Sci. Instrum. 2007, 78, 013705-1-8.
5. Cullity, B. D. Elements of X-Ray Diffraction, 2nd ed.; Addison-Wesley: Reading, MA, 1978.
6. Ziegle, J. F.; Biersach, J. P. 2003. http://www.srim.org/SRIM/SRIMLEGL. htm.
7. Izui, K. J. Phys. Soc. Jpn. 1965, 20, 915-932.
8. Alexander, D. E.; Was, G. S. Phys. Rev. B 1993, 47, 2983-2994.
9. Petri, R.; Brault, P.; Vatel, O.; Henry, D.; Andre, E.; Dumas, P.; Salvan, F. J. Appl. Phys. 1994, 75, 7498-7506.
10. Paramanik, D.; Varma, S. Nucl. Instrum. Methods B 2006, 244, 81-85.
11. Eklund, E. A.; Snyder, E. J.; Williams, R. S. Surf. Sci. 1993, 285, 157-180.