Low-temperature growth of ZnO nanostructures by oxygen plasma oxidation of ZnCl2

Materials Chemistry and Physics

Volumn 129, Issue 3, 2011, Pages 693-695

  Yang, Rong ^a   Zheng, Jie ^a   Li, Wei ^a   Qu, Jianglan ^a   Zhang, Xuanzhou ^a   Li, Xingguo ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Chemical vapor deposition; Nanostructure; Plasma; Thin film; ZnO

Indexed keywords

EXCITED SPECIES; IN-SITU; LOW TEMPERATURE GROWTH; OXYGEN PLASMAS; ZNO; ZNO NANOSTRUCTURES;

CHEMICAL VAPOR DEPOSITION; CHLORINE COMPOUNDS; EMISSION SPECTROSCOPY; FILM PREPARATION; NANOSTRUCTURES; OPTICAL EMISSION SPECTROSCOPY; ORGANOMETALLICS; OXYGEN; PLASMAS; SYNTHESIS (CHEMICAL); THIN FILMS; ZINC OXIDE;

PLASMA DEPOSITION;

EID: 79960556808     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2011.05.027     Document Type: Article

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