Handling the carbon contamination issue at SOLEIL

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8077, Issue , 2011, Pages

  Yao Leclerc, I ^a,b   Brochet, S ^a,c   Chauvet, C ^a,d   De Oliveira, N ^a,d   Duval, J P ^a,b   Gil, J F ^a,d   Kubsky, S ^a,e   Lagarde, B ^a,c   Nahon, L ^a,d   Nicolas, F ^a,e   Silly, M ^a,d   Sirotti, F ^a,d   Thomasset, M ^a,c  

^a SYNCHROTRON SOLEIL   (France)

^b Vacuum Group   (United States)

^c Optical Group   (United Kingdom)

^d TEMPO Beamline ^*  (France)

^e Surfaces Lab   (Switzerland)

Author keywords

Carbon contamination; Cleaning process; Oxygen plasma; VUV and XUV optics damages

Indexed keywords

BEAM-LINES; CARBON COATING; CARBON CONTAMINATION; CARBON K-EDGE; CARBON LAYERS; CLEANING PROCESS; IN-SITU; LOW ENERGIES; OPTICAL COMPONENTS; OPTICAL PERFORMANCE; OXYGEN PLASMA; OXYGEN PLASMAS; OZONE GENERATION; PHOTON BEAMS; SOFT X-RAY RANGE; TRANSMISSION RATIOS; VUV AND XUV;

CLEANING; LIGHT; MULTIPHOTON PROCESSES; OPTICS; OZONE; PARTICLE BEAMS; PHOTOELECTRONS; PHOTONS; X RAY LITHOGRAPHY; X RAYS;

CONTAMINATION;

EID: 79960542609     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.886970     Document Type: Conference Paper

References (11)

1. http://www.synchrotron-soleil.fr/Recherche/LignesLumiere/TEMPO
2. http://www.synchrotron-soleil.fr/portal/page/portal/Recherche/ LignesLumiere/DESIRS
3. F. Polack, M.G. Silly, C. Chauvet, B. Lagarde, N. Bergeard, M. Izquierdo, O. Chubar, D. Krizmancic, M. Ribbens, J.P. Duval, C. Basset, S. Kubsky, F. Sirotti, "TEMPO: a New Insertion Device Beamline at SOLEIL for Time Resolved Photoelectron Spectroscopy Experiments on Solids and Interfaces". AIP Conference Proceedings, 2010, 1234: 185-188. (SRI 2009, Melbourne, Australia, 27 September-2 October 2009).
4. Bergeard, N., Silly, M. G., Krizmancic, D., Chauvet, C., Guzzo, M., Ricaud, J. P., Izquierdo, M., Stebel, L., Pittana, P., Sergo, R., Cautero, C., Dufour, G., Rochet, F., & Sirotti, F. "Time-resolved photoelectron spectroscopy using synchrotron radiation time structure". Journal of Synchrotron Radiation, 2011, 18(2): 245-250
5. F. Sirotti, F. Polack, J.-L. Cantin, M. Sacchi, R. Delaunay, M. Liberati « A new bending magnet double headed dragon at SuperACO », J. Synchrotron Rad. (2000) 7, 5-11
6. C. Chauvet, F. Polack, M. Silly, B. Lagarde, M. Thomasset, S. Kubsky, J.-P. Duval, B. Pilette, I. Yao, N. Bergeard and F. Sirotti "Carbon contamination of soft X-ray beamlines: dramatic anti-reflection coating effects observed in the 1keV photon energy region". Submitted Journal of Synchrotron Radiation.
7. O. Marcouille, P. Brunelle, O. Chubar, F. Marteau, M. Massal, L. Nahon, K. Tavakoli, J. Veteran, and J. M. Filhol, "Design, construction and magnetic measurements of the HU640 (OPHELIE2) undulator dedicated to the DESIRS VUV beamline at SOLEIL," in Synchrotron Radiation Instrumentation, Pts 1 and 2, vol.879, J. Y. Choi, and S. Rah, eds. (2007), pp. 311-314.
8. L. Nahon, and C. Alcaraz, "SU5: a calibrated variable-polarization synchrotron radiation beam line in the vacuumultraviolet range," Applied Optics 43, 1024-1037 (2004).
9. L. Nahon, B. Lagarde, F. Polack, C. Alcaraz, O. Dutuit, M. Vervloet, and K. Ito, "A new VUV high resolution undulator-based beamline at Super-ACO," Nucl. Instrum. Methods Phys. Res. A 404, 418-429 (1998). (Pubitemid 128638834)
10. L. Nahon, C. Alcaraz, J. L. Marlats, B. Lagarde, F. Polack, R. Thissen, D. Lepère, and K. Ito, "Very high spectral resolution obtained with SU5: A vacuum ultraviolet undulator-based beamline at Super-ACO," Rev. Sci. Inst. 72, 1320-1329 (2001). (Pubitemid 33605535)
11. Thomasset, M. & Polack, F. "Characterization of optical surfaces for the present generations of synchrotron sources", Proceedings of SPIE, 2008, 7155: art.no 715506.