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Volumn 135, Issue 2, 2011, Pages
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A generalized mathematical framework for thermal oxidation kinetics
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Author keywords
[No Author keywords available]
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Indexed keywords
CLASSICAL MODEL;
DEAL-GROVE MODEL;
DIFFUSION-CONTROLLED REGIME;
LINEAR CONCENTRATION;
LINEAR RATE;
LINEAR-PARABOLIC;
MATHEMATICAL FRAMEWORKS;
OXIDATION PROCESS;
OXIDATION RATES;
OXIDE LAYER;
PARABOLIC RATE LAW;
POWER LAW;
QUASI-STATIC;
RATE LAWS;
THERMAL OXIDATION;
THERMAL OXIDATION KINETICS;
TRANSPORT PROCESS;
GROWTH KINETICS;
MATHEMATICAL MODELS;
OXIDE FILMS;
STOICHIOMETRY;
OXIDATION;
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EID: 79960501828
PISSN: 00219606
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3607984 Document Type: Article |
Times cited : (36)
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References (20)
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