Growth law of silicon oxides by dry oxidation

Semiconductor Science and Technology

Volumn 11, Issue 7, 1996, Pages 1059-1064

  Kim, Keunjoo ^a   Lee, Young Hee ^a   An, Myung Hwan ^a   Suh, Moon Suhk ^a   Youn, Chang Joo ^a   Lee, Kee Bang ^a   Lee, Hyung Jae ^a  

^a Chonbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DIFFUSION; FILM GROWTH; HEATING; MATHEMATICAL MODELS; OXIDATION; OXIDES; REACTION KINETICS;

THERMAL OXIDATION;

SEMICONDUCTING SILICON;

EID: 0030195006     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/11/7/016     Document Type: Article

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