Atom probe tomography assessment of the impact of electron beam exposure on InxGa1-xN/GaN quantum wells

Applied Physics Letters

Volumn 99, Issue 2, 2011, Pages

  Bennett, Samantha E ^a   Saxey, David W ^b,c   Kappers, Menno J ^a   Barnard, Jonathan S ^a   Humphreys, Colin J ^a   Smith, George D W ^b   Oliver, Rachel A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF OXFORD   (United Kingdom)

^c UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM-PROBE TOMOGRAPHY; CONTROL SAMPLES; ELECTRON-BEAM EXPOSURE; INHOMOGENEITIES; QUANTUM WELL;

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON OPTICS; INDIUM; NITRIDES; PROBES; SEMICONDUCTOR QUANTUM WELLS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRONS;

EID: 79960476369     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3610468     Document Type: Article

References (14)

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