Inclined-wall regular micro-pillar-arrayed surfaces covered entirely with an alumina nanowire forest and their improved superhydrophobicity

Journal of Micromechanics and Microengineering

Volumn 21, Issue 7, 2011, Pages

  Kim, Dae Ho ^a   Kim, Yongsung ^b   Kang, Jae Wook ^c   Hong, Suck Won ^a   Lee, Dongyun ^a   Cho, Chae Ryong ^a   Kim, Soo Hyung ^a   Lee, Deug Woo ^a   Kim, Jong Man ^a  

^a Pusan National University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

^c Korea Institute of Material Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA NANOWIRES; ANODIC ALUMINUM OXIDE; BATCH PROCESS; MICRO PILLARS; SILICON ETCHING; SUPER-HYDROPHOBIC SURFACES; SUPERHYDROPHOBICITY; SURFACE MODELS; SURFACE WETTABILITY; SURFACE WETTING; WENZEL REGIME;

ANODIC OXIDATION; BATCH DATA PROCESSING; CONTACT ANGLE; HYDROPHOBICITY; WETTING;

NANOWIRES;

EID: 79960066028     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/7/075024     Document Type: Article

References (21)

1. Roach P, Shirtcliffe N J and Newton M I 2008 Progress in superhydrophobic surface development Soft Matter 4 224-40
2. Crick C R and Parkin I P 2010 Preparation and characterization of super-hydrophobic surfaces Chem. Eur. J. 16 3568-88
3. Nosonovsky M and Bhushan B 2007 Hierarchical roughness makes superhydrophobic states stable Microelectron. Eng. 84 382-6 (Pubitemid 46241516)
4. Cao L and McCarthy T J 2006 The 'Lotus effect' explained: two reasons why two length scales of topography are important Langmuir 22 2966-7
5. Kwon Y, Patankar N, Choi J and Lee J 2009 Design of surface hierarchy for extreme hydrophobicity Langmuir 25 6129-36
6. Cha T-G, Yi J W, Moon M-Y, Lee K-R and Kim H-Y 2010 Nanoscale patterning of microtextured surfaces to control superhydrophobic robustness Langmuir 26 8319-26
7. Kang C K, Lee S M, Jung I D, Jung P G, Hwang S J and Ko J S 2008 The fabrication of patternable silicon nanotips using deep reactive ion etching J. Micromech. Microeng. 18 075007
8. Zhu L, Xu J, Zhang Z, Hess D W and Wong C P 2005 Lotus effect surface for prevention of microelectromechanical system (MEMS) stiction Electronic Components and Technology Conf. pp 1798-801 (Pubitemid 41276114)
9. Kim D S, Lee B-K, Yeo J, Choi M J, Yang W and Kwon T H 2009 Fabrication of PDMS micro/nano hybrid surface for increasing hydrophobicity Microelectron. Eng. 86 1375-8
10. Xiu Y, Zhu L, Hess D W and Wong C P 2006 Biomimetic creation of hierarchical surface structures by combining colloidal self-assembly and Au sputter deposition Langmuir 22 9676-81 (Pubitemid 44826380)
11. Jeong H E, Lee S H, Kim J K and Suh K Y 2006 Nanoengineered multiscale hierarchical structures with tailored wetting properties Langmuir 22 1640-5
12. Cortese B, D'Amone S, Manca M, Viola I, Cingolani R and Gigli G 2008 Superhydrophobicity due to the hierarchical scale roughness of PDMS surface Langmuir 24 2712-8 (Pubitemid 351542678)
13. Lee C H, Jung P G, Lee S M, Park S H, Shin B S, Kim J-H, Hwang K-Y, Kim K M and Ko J S 2010 Replication of polyethylene nano-micro hierarchical structures using ultrasonic forming J. Micromech. Microeng. 20 035018
14. Xiu Y, Zhu L, Hess D W and Wong C P 2007 Hierarchical silicon etched structures for controlled hydrophobicity/superhydrophobicity Nano Lett. 7 3388-93 (Pubitemid 350216033)
15. Kim D, Kim J, Park H C, Lee K-H and Hwang W 2008 A superhydrophobic dual-scale engineered lotus leaf J. Micromech. Microeng. 18 015019
16. Lee Y, Park S-H, Kim K-B and Lee J-K 2007 Fabrication of hierarchical structures on polymer surface to mimic natural superhydrophobic surfaces Adv. Mater. 19 2330-5 (Pubitemid 47409301)
17. Yoon T O, Shin H J, Jeoung S C and Park Y-I 2008 Formation of superhydrophobic poly(dimethysiloxane) by ultrafast laser-induced surface modification Opt. Express 16 12715-25
18. Wang M-F, Raghunathan N and Ziaie B 2007 A nonlithographic top-down electrochemical approach for creating hierarchical (micro-nano) superhydrophobic silicon surfaces Langmuir 23 2300-3 (Pubitemid 46383638)
19. Patankar N A 2004 Transition between superhydrophobic states on rough surface Langmuir 20 7097-102
20. Kim D-H, Kim Y, Kim B M, Ko J S, Cho C-R and Kim J-M 2011 Uniform superhydrophobic surfaces using micro/nano complex structures formed spontaneously by a simple and cost-effective nonlithographic process based on anodic aluminum oxide technology J. Micromech. Microeng. 21 045003
21. Pal P and Sato K 2010 Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes Microsyst. Technol. 16 1165-74