The fabrication of patternable silicon nanotips using deep reactive ion etching

Journal of Micromechanics and Microengineering

Volumn 18, Issue 7, 2008, Pages

  Kang, Chang Kun ^a   Lee, Sang Min ^a   Jung, Im Deok ^a   Jung, Phill Gu ^a   Hwang, Sung Jin ^a   Ko, Jong Soo ^a  

^a Pusan National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT ANGLE; ELECTRON BEAM LITHOGRAPHY; ETCHING; HYDROPHILICITY; HYDROPHOBICITY; MICROSTRUCTURE; NANOSTRUCTURES; NANOTIPS; NONMETALS; OPTICAL DESIGN; PHOTORESISTORS; PHOTORESISTS; SILICON; SURFACE TREATMENT;

DEEP REACTIVE ION ETCHING (DRIV); FABRICATION METHODS; PLANE SHAPE; SILICON (0 0 1) SURFACES; SILICON NANOTIPS; SUPER-HYDROPHOBIC; WELL ALIGNED;

REACTIVE ION ETCHING;

EID: 47249085200     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/7/075007     Document Type: Article

References (26)

1. Liu Y H, Dam T H and Pantano P 2000 A pH-sensitive nanotip array imaging sensor Anal. Chim. Acta 419 215-25
2. Saya D, Lechlé T, Pourciel J B, Bergaud C and Nicu L 2007 Collective fabrication of an in-plane silicon nanotip for parallel femtoliter droplet deposition J. Micromech. Microeng. 17 N1-5
3. Park J, Park K, Choi B, Koo K, Paik S, Park S, Kim J and Cho D 2003 A novel fabrication process for ultra-sharp, high-aspect ratio nano tips using (111) single crystalline silicon IEEE Int. Conf. on Solid-State Sensors and Actuators (Boston, 9-12 June 2003) (Transducers '03) pp 1144-5
4. Choi C, Hagvall S H, Wu B M, Dunn J C Y, Beygui R E and Kim C J 2007 Cell interaction with three-dimensional sharp-tip nanotopography Biomaterials 28 1672-9
5. Borzenko T, Tormen M, Hock V, Liu J, Schmidt G and Molenkamp L W 2001 Imprint with sharp tip stamps Microelectr. Eng. 57-58 389-96
6. Wang S, Zeng C, Lai S, Juang T, Yang Y and Lee L J 2005 Polymeric nanonozzle array fabricated by sacrificial template imprinting Adv. Mater. 17 1182-6
7. Georgiev D G, Baird R J, Avrutsky I, Auner G, Newaz G and Tokranova N 2005 A systematic study of the formation of nano-tips on silicon thin films by excimer laser irradiation Mater. Res. Soc. Symp. Proc. 872 J13.6
8. Lau K K S, Bico J, Teo K B K, Chhowalla M, Amaratunga G A J, Milne W I, McKinley G H and Gleason K K 2003 Superhydrophobic carbon nanotube forests Nanoletters 3 1701-5
9. Yin A, Kim J H and Xu J 2007 Fabrication of nanostructured thin films using porous alumina templates Mater. Res. Soc. Symp. Proc. 951 E09-15
10. Sitti M and Fearing R S 2003 Synthetic gecko foot-hair micro/nano-structures as dry adhesives J. Adhes. Sci. Technol. 18 1055-74
11. Lärmer F and Schilp A 1996 DE Patent 4241045 US Patent 5501893 EP Patent 625285
12. Chen K, Ayon A A, Zhang X and Spearing S M 2002 Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE) J. Microelectromech. Syst. 11 264-75
13. Jaeger R C 2002 Introduction to Microelectronic Fabrication 2nd edn (Englewood Cliffs, NJ: Prentice-Hall)
14. Ayon A A, Braff R, Lin C C, Sawin H H and Schmidt M A 1999 Characterization of a time multiplexed inductively coupled plasma etcher J. Electrochem. Soc. 1 339-49
15. Ma M and Hill R M 2006 Superhydrophobic surfaces Curr. Opin. Colloid Interface Sci. 11 193-202
16. Blossey R 2003 Self-cleaning surfaces-virtual realities Nature Mater. 2 301-6
17. Zhai L, Cebeci F C, Cohen R E and Rubner M F 2004 Stable superhydrophobic coatings from polyelectrolyte multilayers Nano Lett. 4 1349-53
18. Barthlott W and Neinhuis C 1997 Purity of the scared lotus, or escape from contamination in biological surfaces Planta 202 1-8
19. Feng L, Li S, Li Y, Li H, Zhang L, Zhai J, Song Y, Liu B, Jiang L and Zhu D 2002 Super-hydrophobic surfaces: from natural to artificial Adv. Mater. 14 1857-60
20. Feng Y, Zhou Z, Ye X and Xiong J 2003 Passive valves based on hydrophobic microfluidics Sensors Actuators A 108 138-43
21. Stubenrauch M, Fischer M, Kremin C, Stoebenau S, Albrecht A and Nagel O 2006 Black silicon-new functionalities in microsystems J. Micromech. Microeng. 16 S82-7
22. Costa R C A, Mogensen K B and Kutter J P 2005 Microfabricated porous glass channels for electrokinetic separation devices Lab Chip 5 1310-14
23. Pozzato A, Zilio S D, Fois G, Vendramin D, Mistura G, Belotti M, Chen Y and Natali M 2006 Superhydrophobic surfaces fabricated by nanoimprint lithography Microelectron. Eng. 83 884-8
24. Chen H J H and Hung C S 2007 Fabrication of high-aspect-ratio nanotips integrated with single-crystal silicon cantilevers Nanotechnology 18 355305
25. Baia X D, Zhia C Y, Liua S, Wanga E G and Wangb Z L 2003 High-density uniformly aligned silicon nanotip arrays and their enhanced field emission characteristics Solid State Commun. 125 185-8
26. Bae S Y, Lee C, Mobasser S and Manohara H 2006 Silicon nanotips antireflection surface for micro sun sensor 6th IEEE Conf. on Nanotechnology (Cincinnati, OH, 17-20 July 2006) (IEEE NANO 2006) pp 527-30