SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2319-2321

Enhanced gas-sensing by diamond nanoneedle arrays formed by reactive ion etching

(6) Lu, Chao a Li, Yunlong a Tian, Shibing a Li, Wuxia a Li, Junjie a Gu, Changzhi a

a INSTITUTE OF PHYSICS (China)

Author keywords

Diamond nanoneedle; Gas sensing; Reactive ion etching

Indexed keywords

CHEMICAL SENSING; DIAMOND NANOPARTICLES; ELECTRON TRANSPORT; ETCHING MASKS; GAS SENSING; NANOCRYSTALLINE DIAMOND FILMS; NANODIAMOND FILMS; NANONEEDLE ARRAYS; OXIDIZING GAS; REACTIVE ION; ROOM TEMPERATURE; VERTICALLY ALIGNED;

CHEMICAL DETECTION; DIAMONDS; GAS DETECTORS; IONS; NANONEEDLES;

REACTIVE ION ETCHING;

EID: 79960054861 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2011.02.074 Document Type: Conference Paper

Times cited : (11)

References (15)

1
- 18144443712
- F. Maier, M. Riedel, B. Mantel, J. Ristein, and L. Ley Phys. Rev. Lett. 85 2000 3472
- (2000) Phys. Rev. Lett. , vol.85 , pp. 3472
- Maier, F.¹ Riedel, M.² Mantel, B.³ Ristein, J.⁴ Ley, L.⁵

2
- 0029290616
- W.P. Kang, Y. Gurbuz, J.L. Davidson, and D.V. Kerns Sens. Actuators B 25 1995 421
- (1995) Sens. Actuators B , vol.25 , pp. 421
- Kang, W.P.¹ Gurbuz, Y.² Davidson, J.L.³ Kerns, D.V.⁴

3
- 0031121799
- R.S. Gi, T. Ishikawa, S. Tanaka, T. Kimura, Y. Akiba, and M. Iida Jpn. J. Appl. Phys., Part I 36 1997 2057
- (1997) Jpn. J. Appl. Phys., Part i , vol.36 , pp. 2057
- Gi, R.S.¹ Ishikawa, T.² Tanaka, S.³ Kimura, T.⁴ Akiba, Y.⁵ Iida, M.⁶

4
- 0141921991
- K.S. Song, T. Sakai, H. Kanazawa, Y. Araki, H. Umezawa, M. Tachiki, and H. Kawarada Biosens. Bioelectron. 19 2003 137
- (2003) Biosens. Bioelectron. , vol.19 , pp. 137
- Song, K.S.¹ Sakai, T.² Kanazawa, H.³ Araki, Y.⁴ Umezawa, H.⁵ Tachiki, M.⁶ Kawarada, H.⁷

5
- 33845657441
- L. Metzger, F. Fischer, and W. Mokwa Sens. Actuators, A 133 2007 259
- (2007) Sens. Actuators, A , vol.133 , pp. 259
- Metzger, L.¹ Fischer, F.² Mokwa, W.³

6
- 36749055786
- Q. Wang, S.L. Qu, S.Y. Fu, W.J. Liu, J.J. Li, and C.Z. Gu J. Appl. Phys. 102 2007 103714
- (2007) J. Appl. Phys. , vol.102 , pp. 103714
- Wang, Q.¹ Qu, S.L.² Fu, S.Y.³ Liu, W.J.⁴ Li, J.J.⁵ Gu, C.Z.⁶

7
- 58149306350
- N. Yang, H. Uetsuka, E. Osawa, and C.E. Nebel Nano. Lett. 11 2008 3572
- (2008) Nano. Lett. , vol.11 , pp. 3572
- Yang, N.¹ Uetsuka, H.² Osawa, E.³ Nebel, C.E.⁴

8
- 18744384982
- T.S. Yang, J.Y. Lai, M.S. Wong, and C.L. Cheng J. Appl. Phys. 92 2002 4912
- (2002) J. Appl. Phys. , vol.92 , pp. 4912
- Yang, T.S.¹ Lai, J.Y.² Wong, M.S.³ Cheng, C.L.⁴

9
- 9344228899
- F. Tuinsstra, and J.L. Koening J. Chem. Phys. 53 1970 1126
- (1970) J. Chem. Phys. , vol.53 , pp. 1126
- Tuinsstra, F.¹ Koening, J.L.²

10
- 33745584841
- L.L. Fields, J.P. Zheng, Y. Cheng, and P. Xiong Appl. Phys. Lett. 88 2006 263102
- (2006) Appl. Phys. Lett. , vol.88 , pp. 263102
- Fields, L.L.¹ Zheng, J.P.² Cheng, Y.³ Xiong, P.⁴

11
- 18444400572
- P. Strobel, M. Riedel, J. Ristein, L. Ley, and O. Boltalina Diam. Relat. Mater. 14 2005 451
- (2005) Diam. Relat. Mater. , vol.14 , pp. 451
- Strobel, P.¹ Riedel, M.² Ristein, J.³ Ley, L.⁴ Boltalina, O.⁵

12
- 0035828734
- J. Ristein, M. Riedel, F. Maier, B.F. Mantel, M. Stammler, and L. Ley J. Phys.-Conden. Matt. 13 2001 8979
- (2001) J. Phys.-Conden. Matt. , vol.13 , pp. 8979
- Ristein, J.¹ Riedel, M.² Maier, F.³ Mantel, B.F.⁴ Stammler, M.⁵ Ley, L.⁶

13
- 33646816010
- L. Gan, E. Baskin, C. Saguy, and R. Kalish Phys. Rev. Lett. 96 2006 196808
- (2006) Phys. Rev. Lett. , vol.96 , pp. 196808
- Gan, L.¹ Baskin, E.² Saguy, C.³ Kalish, R.⁴

14
- 34047247387
- P.C.P. Watts, N. Mureau, Z. Tang, Y. Miyajima, J.D. Carey, and S.R.P. Silva Nanotechnology 18 2007 175701
- (2007) Nanotechnology , vol.18 , pp. 175701
- Watts, P.C.P.¹ Mureau, N.² Tang, Z.³ Miyajima, Y.⁴ Carey, J.D.⁵ Silva, S.R.P.⁶

15
- 31544470346
- Y. Huang, S. Yue, Z. Wang, Q. Wang, C. Shi, Z. Xu, X.D. Bai, C. Tang, and C. Gu J. Phys. Chem. B 110 2006 796
- (2006) J. Phys. Chem. B , vol.110 , pp. 796
- Huang, Y.¹ Yue, S.² Wang, Z.³ Wang, Q.⁴ Shi, C.⁵ Xu, Z.⁶ Bai, X.D.⁷ Tang, C.⁸ Gu, C.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.