Surface-micromachined thermoelectric infrared focal-plane array with high detectivity for room temperature operation

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2267-2271

  Ihring, Andreas ^a   Kessler, Ernst ^a   Dillner, Ulrich ^a   Haenschke, Frank ^a   Schinkel, Uwe ^a   Meyer, Hans Georg ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

Colloidal silver black layer; High detectivity; Quarter wavelength absorber; Surface micromachining; Thermoelectric infrared focal plane array

Indexed keywords

ACTIVE AREA; COLLOIDAL SILVER; DETECTIVITY; HIGH INTEGRATION LEVEL; HIGH RELIABILITY; INFRARED FOCAL PLANE ARRAYS; LIFTOFF TECHNIQUE; LOW ENERGY CONSUMPTION; MANUFACTURING PROCESS; QUARTER-WAVELENGTH; ROOM-TEMPERATURE OPERATION; SACRIFICIAL LAYER; SPACE SCIENCE; SPECTRAL IMAGING; STRUCTURE DIMENSIONS; THERMOELECTRIC INFRARED FOCAL-PLANE ARRAY; THERMOELECTRIC LAYERS; TRACK RECORDINGS; WAVELENGTH RANGES;

DETECTORS; ENERGY UTILIZATION; MICROMACHINING; POLYIMIDES; TERNARY SYSTEMS; THERMOCOUPLES; TWO DIMENSIONAL;

SURFACES;

EID: 79960040201     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.075     Document Type: Conference Paper

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