SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2208-2210

Piezoelectrically actuated MEMS microswitches for high current applications

(8) Balma, D a Lamberti, A a,b Marasso, S L a Perrone, D a Quaglio, M b Canavese, G b Bianco, S b Cocuzza, M a,c

a POLITECNICO DI TORINO (Italy)

b ISTITUTO ITALIANO DI TECNOLOGIA (Italy)

c IMEM CNR (Italy)

Author keywords

MEMS; Microcantilever; Microswitch; PZT

Indexed keywords

DRIVE CURRENTS; ELECTRON BEAM EVAPORATION; EUTECTIC BONDING; HIGH CURRENT APPLICATIONS; LEAD ZIRCONATE TITANATE; METAL ELECTRODES; MICRO-CANTILEVERS; MICROSWITCHES; MULTI-LAYERED; PZT; SIGNAL LINES; SILICON SUBSTRATES;

ELECTRON BEAMS; MICROSTRIP LINES; SEMICONDUCTING LEAD COMPOUNDS; SILICON NITRIDE; SOL-GEL PROCESS;

COMPOSITE MICROMECHANICS;

EID: 79960039030 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2011.02.097 Document Type: Conference Paper

Times cited : (14)

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