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Volumn 687, Issue , 2011, Pages 610-616

Effect of annealing on formation and microstructure of ZnTiO3 thin films by DC reactive magnetron co-sputtering

Author keywords

Annealing; Microstructure; Reactive sputtering; Thin film; Zinc titanate

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CHEMICAL ANALYSIS; ELECTRON SPECTROSCOPY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRONS; MICROSTRUCTURE; OXIDE MINERALS; REACTIVE SPUTTERING; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SPUTTER DEPOSITION; THIN FILMS; TITANIUM DIOXIDE;

EID: 79959979338     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.687.610     Document Type: Conference Paper
Times cited : (5)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.