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Volumn 687, Issue , 2011, Pages 610-616
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Effect of annealing on formation and microstructure of ZnTiO3 thin films by DC reactive magnetron co-sputtering
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Author keywords
Annealing; Microstructure; Reactive sputtering; Thin film; Zinc titanate
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
CHEMICAL ANALYSIS;
ELECTRON SPECTROSCOPY;
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;
MAGNETRONS;
MICROSTRUCTURE;
OXIDE MINERALS;
REACTIVE SPUTTERING;
SCANNING ELECTRON MICROSCOPY;
SILICON COMPOUNDS;
SPUTTER DEPOSITION;
THIN FILMS;
TITANIUM DIOXIDE;
ANNEALING TEMPERATURES;
COLUMNAR STRUCTURES;
CRYSTALLIZATION PHENOMENON;
EFFECT OF ANNEALING;
ELECTRON SPECTROSCOPY FOR CHEMICAL ANALYSIS;
REACTIVE MAGNETRON CO-SPUTTERING;
TRANSMISSION ELECTRON;
ZINC TITANATE;
ZINC COMPOUNDS;
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EID: 79959979338
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/MSF.687.610 Document Type: Conference Paper |
Times cited : (5)
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References (15)
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