Investigation of H2:CH4 plasma composition by means of spatially resolved optical spectroscopy

Acta Physica Polonica A

Volumn 114, Issue 6 A, 2008, Pages

  Bogdanowicz, R ^a  

^a GDANSK UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

EXCITED STATES; INTAKE SYSTEMS; OPTICAL EMISSION SPECTROSCOPY; PLASMA CVD;

CHEMICAL VAPOUR DEPOSITION; DIAMOND LIKE CARBON; HIGH SENSITIVITY MEASUREMENT; INLET CONFIGURATION; MEASUREMENT SYSTEM; OPTICAL SPECTROSCOPY; PLASMA-ASSISTED CVD; SPATIALLY RESOLVED OPTICAL EMISSION;

PLASMA DIAGNOSTICS;

EID: 79959917328     PISSN: 05874246     EISSN: 1898794X     Source Type: Journal    
DOI: 10.12693/aphyspola.114.a-33     Document Type: Article

References (10)

1. S. Huang, Diam,. Rel. Mat. 15, 22 (2006).
2. M. Kubovic, A. Aleksov, M. Schreck, Diam. Rel. Mat. 12, 403 (2003).
3. C. Hsiao-Kuo, Diam. Rel. Mat. 10, 1584 (2001).
4. A. Herman, P. Wroczyński, Adv. Sci. Technol. 6, 141 (1995).
5. J.A.C. Broekaert, Analytical Atomic Spectrometry with Flamed and Plasma, Wiley-VCH Verlag, Weinheim 2002.
6. Y. Liao, C.H. Li, Z.Y. Ye, Diam. Rel. Mat. 9, 1716 (2000).
7. R. Bogdanowicz, M. Gnyba, P. Wroczynski, J. Phys. IV (France) 137, 57 (2006).
8. R. Bogdanowicz, M. Gnyba, Eur. Phys. J. Special Topics 144, 209 (2007).
9. R. Chen, C. Rangan, C.J. Spanos, in:Proc. IEEE Int. Symp. on Semiconductor Manufacturing Conference D9, Ed. J.W. Fowler, IEEE, San Francisco 1997.
10. I. Sobelman, Atomic Spectra and Radiative Transitions, Springer-Verlag, Berlin 1992.