Application of image spectrometer to in situ infrared broadband optical monitoring for thin film deposition

Optics Express

Volumn 19, Issue 14, 2011, Pages 12969-12977

  Cai, Qing Yuan ^a   Zheng, Yu Xiang ^a   Zhang, Dong Xu ^a   Lu, Wei Jie ^a   Zhang, Rong Jun ^a   Lin, Wei ^a   Zhao, Hai Bin ^a   Chen, Liang Yao ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; DATA HANDLING; DEPOSITION; INFRARED IMAGING; REFRACTIVE INDEX; SPECTROMETERS; SPECTROMETRY; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION;

BROADBAND OPTICAL MONITORING; DATA PROCESSING METHODS; DEPOSITION PARAMETERS; DEPOSITION PROCESS; FITTING RESULTS; IN-SITU; INFRARED IMAGES; LINEAR-ARRAY; NARROW-BAND PASS FILTERS; REAL TIME; THIN-FILM DEPOSITIONS;

OPTICAL FILMS;

ARTICLE; ARTIFICIAL MEMBRANE; INFRARED RADIATION; INFRARED SPECTROPHOTOMETRY; INSTRUMENTATION; MATERIALS; RADIATION EXPOSURE; REFRACTOMETRY; STATISTICS;

INFRARED RAYS; MANUFACTURED MATERIALS; MEMBRANES, ARTIFICIAL; REFRACTOMETRY; SPECTROPHOTOMETRY, INFRARED;

EID: 79959896613     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.012969     Document Type: Article

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