Novel linearly and circularly polarized 60 GHz MEMS antennas on low- and high-resistivity silicon

Proceedings of the 5th European Conference on Antennas and Propagation, EUCAP 2011

Volumn , Issue , 2011, Pages 1194-1198

  Sallam, M O ^a   Soliman, E A ^a   Sedky, S ^a  

^a The American University in Cairo   (Egypt)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCULARLY POLARIZED; CIRCULARLY POLARIZED WAVES; CROSS-POLARIZATION LEVEL; DRIVING CIRCUITS; FABRICATION PROCESS; FRONT TO BACK RATIO; GROUND METALS; HIGH RADIATION EFFICIENCY; HIGH RESISTIVITY SILICON; HYBRID INTEGRATION; LINEARLY POLARIZED; LOW RADIATION; MEMS ANTENNAS; POLARIZATION PURITY; TRANSMITTER AND RECEIVER;

COMMUNICATION SYSTEMS; POLARIZATION; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SUBSTRATES; WAFER BONDING;

ANTENNAS;

EID: 79959661937     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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