Micromachined loop antennas on low resistivity silicon substrates

IEEE Transactions on Antennas and Propagation

Volumn 54, Issue 12, 2006, Pages 3593-3601

  Öjefors, Erik ^a   Kratz, Henrik ^a   Grenier, Katia ^b   Plana, Robert ^b   Rydberg, Anders ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b LAAS CNRS   (France)

Author keywords

Loop antennas; Micromachining; Silicon; Slot antennas

Indexed keywords

ACTIVE DEVICES; BULK SILICON; LARGE CHIPS; LOW RESISTIVITY; LOW-RESISTIVITY SILICON SUBSTRATE; MICROMACHINED; SILICON SUBSTRATES; SLOT LOOP ANTENNA; WIRE LOOP;

ANTENNA ARRAYS; COMPOSITE MICROMECHANICS; LOOP ANTENNAS; MICROMACHINING; WIRE;

SLOT ANTENNAS;

EID: 40149092531     PISSN: 0018926X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TAP.2006.886532     Document Type: Article

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