Temperature dependent H2S and Cl2 sensing selectivity of Cr2O3 thin films

Sensors and Actuators, B: Chemical

Volumn 157, Issue 2, 2011, Pages 466-472

  Balouria, Vishal ^a,b   Kumar, Arvind ^a   Singh, A ^a   Samanta, S ^a   Debnath, A K ^a   Mahajan, Aman ^b   Bedi, R K ^b   Aswal, D K ^a   Gupta, S K ^a   Yakhmi, J V ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

^b GURU NANAK DEV UNIVERSITY   (India)

Author keywords

Adsorbed oxygen; Cr2O3 thin films; Gas sensing; XPS

Indexed keywords

ADSORBED OXYGEN; CHEMISORBED OXYGEN; CONDUCTOMETRICS; CR FILM; CR2O3 THIN FILMS; ELECTRON BEAM DEPOSITIONS; GAS CONCENTRATION; GAS SENSING; GAS SENSING CHARACTERISTICS; KELVIN PROBE METHOD; OPERATING TEMPERATURE; OXYGEN ANNEALING; QUARTZ SUBSTRATE; TEMPERATURE DEPENDENT; WORK FUNCTION MEASUREMENTS;

CHEMICAL DETECTION; CHEMICAL MODIFICATION; CHEMISORPTION; GAS DETECTORS; OXYGEN; QUARTZ; TEMPERATURE; THIN FILMS;

VAPOR DEPOSITION;

EID: 79959630003     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.05.002     Document Type: Article

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