Picosecond-laser 4-beam-interference ablation as a flexible tool for thin film microstructuring

Physics Procedia

Volumn 12, Issue PART 2, 2011, Pages 116-124

  Voisiat, B ^a   Gedvilas, M ^a   Indrisinas S ^a   Raciukaitis G ^a  

^a CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

Laser beam interference ablation; Periodic structures; Picosecond laser; Thin films

Indexed keywords

ABLATION; FLUORINE; LASER BEAMS; MANUFACTURE; METALLIC FILMS; PERIODIC STRUCTURES;

4F IMAGING SYSTEMS; BEAM INTERFERENCE; DIRECT STRUCTURING; HIGH PULSE ENERGY; INTERFERENCE PATTERNS; PICOSECOND LASER; PROCESS PARAMETERS; REGULAR STRUCTURE;

THIN FILMS;

EID: 79959443666     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2011.03.113     Document Type: Conference Paper

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