Direct-write subwavelength structuring with femtosecond laser pulses

Optical Engineering

Volumn 44, Issue 5, 2005, Pages 1-5

  Koch, Jürgen ^a   Korte, Frank ^a   Fallnich, Carsten ^a   Ostendorf, Andreas ^a   Chichkov, Boris N ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Femtosecond lasers; Material processing; Nanostructuring

Indexed keywords

DIELECTRIC MATERIALS; DIFFRACTION; IRRADIATION; LASER ABLATION; LIQUID METALS; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY;

FEMTOSECOND LASER PULSES; FEMTOSECOND LASERS; MATERIAL PROCESSING; NANOSTRUCTURING;

LASER PULSES;

EID: 24044475251     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1904053     Document Type: Article

References (12)

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