A cost of ownership model for imprint lithography templates for HDD applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7488, Issue , 2009, Pages

  Grenon, Brian J ^a  

^a Grenon Consulting Inc   (United States)

Author keywords

Bit patterned media (BPM); Cost of ownership; Discrete track recording (DTR); High density disk (HDD); Nano imprint; Nano imprint stamp; Pattern generation; Template

Indexed keywords

BIT-PATTERNED MEDIA; COST OF OWNERSHIP; DISCRETE TRACK RECORDING; HIGH DENSITY; NANO-IMPRINT; PATTERN GENERATION; TEMPLATE;

COSTS; HARD DISK STORAGE; PHOTOMASKS; PROFITABILITY;

NANOIMPRINT LITHOGRAPHY;

EID: 79959366853     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.833468     Document Type: Conference Paper

References (3)

1. W.J. Dauksher N.V. Le, E.S. Ainley, K.J. Nordquist, K.A. Gehoski, S.R. Young, J.H. Baker, D. Convey and P.S. Mangat, "Nano-imprint Lithography: Templates, Imprinting and Wafer Pattern Transfer", Microelectronic Engineering, Issues 4-9, April-September 2006, pp. 929-932.
2. st Annual Symposium on Photomask Technology, Volume No. 4562, pp. 321-328, (2001). (Pubitemid 35187507)
3. nd European Mask and Lithography Conference, Volume 6281, (2006).