UV lithography-based protein patterning on silicon: Towards the integration of bioactive surfaces and CMOS electronics

Applied Surface Science

Volumn 257, Issue 20, 2011, Pages 8413-8419

  Lenci, S ^a   Tedeschi, L ^b   Pieri, F ^a   Domenici, C ^b  

^a Dipartimento di Ingegneria dell'Informazione   (Italy)

^b CNR   (Italy)

Author keywords

APTES; Biosensors; CMOS; Protein patterning; Silanization; UV lithography

Indexed keywords

BIOSENSORS; FLUORESCENCE MICROSCOPY; GOLD NANOPARTICLES; METALS; MICROELECTRONICS; MOS DEVICES; OXIDE SEMICONDUCTORS; PHOTORESISTS; PROTEINS; SCANNING ELECTRON MICROSCOPY; SILICON;

APTES; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; MICROELECTRONIC TECHNOLOGIES; PHOTORESIST LITHOGRAPHY; PROTEIN PATTERNING; SELECTIVE IMMOBILIZATION; SILANIZATIONS; UV LITHOGRAPHY;

CMOS INTEGRATED CIRCUITS;

EID: 79959364225     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.04.096     Document Type: Article

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