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Volumn 83, Issue 12, 2011, Pages 5017-5022

Sensitive gas analysis system on a microchip and application for on-site monitoring of NH3 in a clean room

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA GAS; AUTOMATED OPERATIONS; CONCENTRATION FACTORS; CONTACT TIME; CONTINUOUS MONITORING; DEAD VOLUMES; DETECTABILITY; EXTRACTION METHOD; EXTRACTION RATE; FLUIDIC NETWORKS; GAS-PUMPING UNIT; HIGH SENSITIVITY; HIGHLY SENSITIVE; LIQUID FLOW RATES; LIQUID PHASIS; LOWER LIMIT OF DETECTIONS; MICROFLUIDIC CHIP; MONITORING APPLICATIONS; ON-SITE MONITORING; PORTABLE SYSTEM; PTFE MEMBRANES; SEPARATION METHODS; SIGNAL TO NOISE; THREE DIMENSIONS;

EID: 79959226206     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac200884z     Document Type: Article
Times cited : (20)

References (32)
  • 3
    • 79959237536 scopus 로고    scopus 로고
    • International technology roadmap for semiconductor 2004 Update, 2004
    • International technology roadmap for semiconductor 2004 Update, 2004.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.