Micro continuous gas analysis system of ammonia in cleanroom

Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn , Issue , 2009, Pages 609-611

  Aota, Aarata ^a,b   Mawatari, Kazuma ^a   Kihira, Yuko ^a   Sasaki, Mari ^a   Kitamori, Takehiko ^b  

^a Institute of Microchemical Technology (IMT)   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Gas analysis; Microfluidics; Multiphase flow; Phase separation; Thermal lens microscopy

Indexed keywords

CLEAN ROOMS; EXTRACTION; GAS FUEL ANALYSIS; LABORATORIES; MICROFLUIDICS; MICROPROCESSOR CHIPS; MULTIPHASE FLOW; PHASE SEPARATION; PHOTORESISTS;

ANALYSIS SYSTEM; CLEANROOM AIR; CONTINUOUS DETECTIONS; CONTINUOUS MONITORING SYSTEMS; LIMIT OF DETECTION; PHOTO PATTERNING; PROTOTYPE SYSTEM; THERMAL LENS MICROSCOPIES;

AMMONIA;

EID: 84901765059     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. K. Uchiyama et al., Proc. MicroTAS2007, pp. 1450 (2007).