Piezoresistive silicon thin film sensor array for biomedical applications

Thin Solid Films

Volumn 519, Issue 14, 2011, Pages 4574-4577

  Alpuim, P ^a   Correia, V ^a   Marins, E S ^a   Rocha, J G ^a   Trindade, I G ^b   Lanceros Mendez, S ^a  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF BEIRA INTERIOR   (Portugal)

Author keywords

Flexible electronics; Hot wire CVD; Nanocrystalline silicon; Piezoresistance; Sensors; Thin films

Indexed keywords

BIOMEDICAL APPLICATIONS; DIGITAL DATAS; FLEXIBLE POLYIMIDE; GAUGE FACTORS; HOT WIRE CHEMICAL VAPOR DEPOSITION; HOT WIRE CVD; HUMAN BODIES; HYDROGENATED NANOCRYSTALLINE SILICON THIN FILM; LATERAL DIMENSION; LIFT-OFF PROCESS; LOAD CONDITION; LOW POWER; MATRIX; METALLIC PADS; MICRO RESISTOR; PIEZO-RESISTIVE; PIEZO-RESISTORS; PIEZORESISTANCE; QUASI-STATIC; READ-OUT CIRCUIT; SENSING ELEMENTS; SILICON THIN FILM; TEST STRUCTURE; WIRELESS DATA;

CHEMICAL VAPOR DEPOSITION; DEPOSITION; FLEXIBLE ELECTRONICS; MEDICAL APPLICATIONS; NANOCRYSTALLINE SILICON; OHMIC CONTACTS; POLYIMIDES; REACTIVE ION ETCHING; SENSOR ARRAYS; TANTALUM; THIN FILMS; WIRE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 79958838359     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.300     Document Type: Conference Paper

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