High-performance MEMS-based gas chromatography column with integrated micro heater

Microsystem Technologies

Volumn 17, Issue 4, 2011, Pages 523-531

  Lee, Chia Yen ^a   Liu, Chan Chiung ^a   Chen, Shih Chuan ^b   Chiang, Che Ming ^c   Su, Yu Hao ^a   Kuo, Wen Cheng ^d  

^a NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b DA YEH UNIVERSITY   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^d NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

A-THERMAL; APPLIED VOLTAGES; CONSTANT TEMPERATURE; COVER PLATE; FUSION PROCESS; GAS CHROMATOGRAPHY COLUMN; INJECTION CONDITIONS; MICRO-HEATERS; MIXED SAMPLES; THEORETICAL PLATE NUMBERS; WET-ETCHING PROCESS;

ACETONE; BENZENE; COLUMN CHROMATOGRAPHY; METHANOL; MICROELECTROMECHANICAL DEVICES; PLATINUM; SERPENTINE; TOLUENE; VOLATILE ORGANIC COMPOUNDS; WET ETCHING;

GAS CHROMATOGRAPHY;

EID: 79958797523     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1165-y     Document Type: Conference Paper

References (14)

1. Agah M, Potkay JA, Lambertus G, Sacks T, Wise KD (2005) Highperformance temperature-programmed microfabricated gas chromatography columns. J Microelectromech Syst 14(5):1039-1050 (Pubitemid 41555295)
2. Bhushan A, Yemane D, Trudell D, Overton EB, Goettert J (2007) Fabrication of micro-gas chromagraph columns for fast chromatography. Microsyst Technol 13:361-368 (Pubitemid 46012833)
3. Eckenrode BA (1998) The application of an integrated multifunctional field-portable GC/MS system. Field Anal Chem Technol 2:3-20
4. Golay MJE, Desty DH (1958) In gas chromatography 1958 (Amsterdam Symposium). Academic Press, New York
5. Hinshaw JV, Ettrt LS (1994) Introduction to open-tubular column gas chromatography. Advanstar Communications, Cleveland
6. Overton EB, Dharmasena HP, Ehrmann U, Carney KY (1996) Trends and advance in portable analytical instrumentation. Field Anal Chem Technol 1:87-92 (Pubitemid 126680743)
7. Reston RR, Kolesar ES Jr (1994) Silicon-micromachined gas chromatography system used to separate and detect ammonia and nitrogen dioxide. Part I. Design, fabrication, and integration of the gas chromatography system. J Microelectromech Syst 3(4):134-146
8. Sanchez JB, Berger F, Fromm M, Nadal MH (2006) A selective gas detection micro-device for monitoring the volatile organic compounds pollution. Sens Actuators B 119:227-233 (Pubitemid 44354859)
9. Spangler GE (2001) Relationships for modeling the performance of rectangular gas chromatographic columns. J Microcolumn Sep 13(7):285-292 (Pubitemid 33655562)
10. Terry SC, Jerman JH, Angell JB (1979) A gas chromatographic air analyzer fabricated on a silicon wafer. IEEE Trans Electron Dev ED-26:880-1886
11. Tian WC, Chan HKL, Lu CJ, Pang SW, Zellers ET (2005) Multiplestage microfabricated preconcentrator-focuser for micro gas chromatography system. J Microelectromech Syst 14(3): 498-507 (Pubitemid 41005069)
12. Van Deemter JJ, Zuiderweg FJ, Klinkenberg A (1956) Longitudinal diffusion and resistance to mass transfer as causes of nonideality in chromatography. Chem Eng Sci 5:271-289
13. Zampolli S, Elmi I, Stürmann J, Nicoletti S, Dori L, Cardinali GC (2005) Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column. Sens Actuators B 105:400-406 (Pubitemid 40330114)
14. Zareian-Jahromi MA, Ashraf-Khorassani M, Taylor LT, Agah M (2000) Design, modeling, and fabrication of MEMS-based multicapillary gas chromatographic columns. J Microelectromech Syst 18(1):28-37