Electrical characterization of aluminium oxide-aluminium thin film composites by impedance spectroscopy

Microelectronics Reliability

Volumn 51, Issue 7, 2011, Pages 1225-1229

  Tadaszak, Katarzyna ^a   Nitsch, Karol ^a   Piasecki, Tomasz ^a   Posadowski, Witold M ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINIUM ELECTRODE; COMPOSITE LAYER; ELECTRICAL CHARACTERIZATION; ELECTRICAL EQUIVALENT CIRCUIT; IMPEDANCE SPECTROSCOPY; METAL-OXIDE; REACTIVE PULSED MAGNETRON SPUTTERING; SINGLE MAGNETRONS; THIN FILM COMPOSITES;

NANOCOMPOSITE FILMS; OXIDES; SPECTROSCOPIC ANALYSIS; THIN FILMS;

ALUMINUM;

EID: 79958175855     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2011.03.030     Document Type: Conference Paper

References (11)

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