Effect of aluminium doping on structural and gas sensing properties of zinc oxide thin films deposited by spray pyrolysis

Sensors and Actuators, B: Chemical

Volumn 156, Issue 2, 2011, Pages 943-948

  Badadhe, Satish S ^a   Mulla, I S ^a,b  

^a NATIONAL CHEMICAL LABORATORY   (India)

^b CENTRE FOR MATERIALS FOR ELECTRONICS TECHNOLOGY C MET   (India)

Author keywords

Aluminium; H2S sensor; Spray pyrolysis; Thin film; Zinc oxide

Indexed keywords

AL-DOPED ZNO; CRYSTAL PLANES; DOPED ZNO; DOPING CONCENTRATION; GAS RESPONSE; GAS SENSING PROPERTIES; GLASS SUBSTRATES; H2S SENSOR; INTENSITY RATIO; OPERATING TEMPERATURE; XRD STUDIES; ZINC OXIDE THIN FILMS; ZNO;

ALUMINUM; DEPOSITION; GAS SENSING ELECTRODES; METALLIC FILMS; OXIDE FILMS; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS; ZINC; ZINC OXIDE;

SPRAY PYROLYSIS;

EID: 79958103557     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.03.010     Document Type: Article

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