메뉴 건너뛰기




Volumn , Issue , 2005, Pages 187-192

Robust internal model control with feedforward controller for a high-speed motion platform

Author keywords

Feedforward control; High accuracy; High speed; Internal model control; Motion control system; Robust control

Indexed keywords

FEEDFORWARD CONTROL; INTELLIGENT ROBOTS; MODEL PREDICTIVE CONTROL; MOTION CONTROL; ROBUST CONTROL; SYSTEM STABILITY;

EID: 79958011580     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2005.1545276     Document Type: Conference Paper
Times cited : (16)

References (12)
  • 2
    • 0004270122 scopus 로고    scopus 로고
    • Robust run-to-run control for semiconductor manufacturing: An internal model control approach
    • S. Adivikolanu and E. Zafiriou, "Robust run-to-run control for semiconductor manufacturing: an internal model control approach," Proceeding of the American Control Conference, pp.3687-3691, 1998.
    • (1998) Proceeding of the American Control Conference , pp. 3687-3691
    • Adivikolanu, S.1    Zafiriou, E.2
  • 3
    • 64949145533 scopus 로고    scopus 로고
    • The theory and design of adaptive internal model control schemes
    • A. Datta and L. Xing, "The theory and design of adaptive internal model control schemes," Proceeding of the American Control Conference, pp.3677-3684, 1998.
    • (1998) Proceeding of the American Control Conference , pp. 3677-3684
    • Datta, A.1    Xing, L.2
  • 4
    • 0033350187 scopus 로고    scopus 로고
    • ∞ optimization for stable plants
    • DOI 10.1109/9.802930
    • ∞?optimization for stable plants," IEEE Transactions On Automatic Control, vol.44, no.11, pp.2130-2134, 1999. (Pubitemid 30531657)
    • (1999) IEEE Transactions on Automatic Control , vol.44 , Issue.11 , pp. 2130-2134
    • Datta, A.1    Xing, L.2
  • 6
    • 0029288401 scopus 로고
    • ∞?control of uncertain nonlinear system via stat feedback
    • Apr
    • ∞?control of uncertain nonlinear system via stat feedback," IEEE Transactions on Automatic Control, Vol. 40 Issue: 4, pp. 766-768, Apr, 1995.
    • (1995) IEEE Transactions on Automatic Control , vol.40 , Issue.4 , pp. 766-768
    • Shen, T.1    Tamura, K.2
  • 7
    • 0036647351 scopus 로고    scopus 로고
    • x /μ feedback control design for high-precision wafer stage motion
    • DOI 10.1016/S0967-0661(01)00166-6, PII S0967066101001666
    • ∞/μ ?feedback control design for high-precision wafer stage motion," Control Engineering Practice, vol. 10, pp. 739-755, 2002. (Pubitemid 34850605)
    • (2002) Control Engineering Practice , vol.10 , Issue.7 , pp. 739-755
    • Van De Wal, M.1    Van Baars, G.2    Sperling, F.3    Bosgra, O.4
  • 8
    • 2542523816 scopus 로고    scopus 로고
    • Optiomal and robust feedback controller estimation for a vibrating plate
    • F. Rufus, V. Michel, D. Niek and B. Arthus, "Optiomal and robust feedback controller estimation for a vibrating plate," Control Engineering Practice, no.12, pp.1017-1027, 2004.
    • (2004) Control Engineering Practice , Issue.12 , pp. 1017-1027
    • Rufus, F.1    Michel, V.2    Niek, D.3    Arthus, B.4
  • 9
    • 0001067046 scopus 로고
    • Robust control design for uncertain nonlinear systems via feedback linearization
    • Y. Chou and W. Wu, 'Robust control design for uncertain nonlinear systems via feedback linearization, ' Chemical Enginerring Science, vol.50, No.9, pp.1429-1439, 1995.
    • (1995) Chemical Enginerring Science , vol.50 , Issue.9 , pp. 1429-1439
    • Chou, Y.1    Wu, W.2
  • 10
    • 79958002280 scopus 로고    scopus 로고
    • Techniques of model-based control
    • Prentice Hall PTR., networks, July
    • C. Brosilow and B. Joseph, Techniques of Model-Based Control. Prentice Hall PTR. 2002. networks," IEEE Trans. Neural Networks, vol. 4, pp. 570-578, July 1993.
    • (2002) IEEE Trans. Neural Networks , vol.4 , pp. 570-578
    • Brosilow, C.1    Joseph, B.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.