A four degree of freedom MEMS microgripper with novel bi-directional thermal actuators

2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS

Volumn , Issue , 2005, Pages 2814-2819

  Greminger, Michael A ^a   Sezen, A Serdar ^a   Nelson, Bradley J ^b  

^a University of Minnesota   (United States)

^b Institute of Robotics and Intelligent Systems   (Switzerland)

Author keywords

Compliant mechanism; MEMS; Microassembly; Microgripper; Microrobotics

Indexed keywords

ACTUATORS; COMPLIANT MECHANISMS; FEEDBACK; GRIPPERS; INTELLIGENT ROBOTS; MECHANISMS; MEMS; SENSORY FEEDBACK;

FOUR DEGREE OF FREEDOM; MICRO ASSEMBLY; MICRO ROBOTICS; MICROGRIPPER; NUMBER OF DEGREES OF FREEDOM; RIGID LINK MECHANISMS; THERMAL MICROACTUATORS; TWO-DEGREE OF FREEDOM;

DEGREES OF FREEDOM (MECHANICS);

EID: 79958003768     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2005.1545137     Document Type: Conference Paper

References (16)

1. Benecke, W., Riethmuller, W., "Applications of silicon- microactuators based on bimorph structure," Micro Electro Mechanical Systems, Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots', pp. 116 - 120, Feb. 20-22, 1989.
2. Chronis, N., Lee, L.P., "Polymer MEMS-based microgripper for single cell manipulation," 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2004), pp:17 - 20, 2004, 2004.
3. Dechev, N., Cleghorn, W.L., Mills, J.K., "Microassembly of 3-D microstructures using a compliant, passive microgripper," Journal of Microelectromechanical Systems, vol. 13, no. 2, pp. 176 - 189, April 2004.
4. Greminger, M.A., Nelson, B.J., "Vision-Based Force Measurement," IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 26, No. 3, pp. 290-298, March 2004.
5. Greminger, M.A., Nelson, B.J., "Deformable object tracking using the boundary element method," IEEE Computer Society Conference on Computer Vision and Pattern Recognition (CVPR2003), Vol. 1, pp. 289 -294, June 2003.
6. Guckel, H., Klein, J., Christenson, T., Skrobis, K., Laudon, M., Lovell, E.G., "Thermo-Magnetic Metal Flecture Actuators," Proceedings of the 5th IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 22-25, 1992.
7. Huang, Q.A., Lee, N.K.S., "Analysis and design of polysilicon thermal flexure actuator," Journal of Micromechanics and Microengineering, vol. 9, no. 1, pp. 64-70, March 1999.
8. Noda, N., Hetnarski, R.B., Tanigawa, Y., Thermal Stress, 2nd ed., Taylor and Francis, London, 2003.
9. Que, L., Park, J.S., Gianchandani, Y.B., "Bent-beam electro-thermal actuators for high force applications," Twelfth IEEE International Conference on Micro Electro Mechanical Systems (MEMS99), pp. 31 - 36, Jan. 17-21, 1999.
10. Riethmüller, W., Benecke, W., "Thermally Excited Silicon Microactuators," IEEE Transactions on Electron Devices, vol. 35, no. 6, pp. 758 - 763, June 1988.
11. Rohsenow, W.M., Hartnett, J.P., Ganic, E.N., Handbook of Heat Transfer Fundamentals, 2nd ed., McGraw-Hill, New York, 1985.
12. Sinclair, M.J., "A high force low area mems thermal actuator," The Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, vol. 1, pp. 127-132, May 23-26, 2000.
13. Sun, Y., Greminger, M.A., Nelson, B.J., "Investigating Protein Structure Change in the Zona Pellucida with a Microrobotic System," International Journal of Robotics Research, 2004.
14. Wang, X., Ananthasuresh, G. K., Ostrowski, J. P., "Vision-based sensing of forces in elastic objects," Sensors and Actuators A-Physical, Vol. 94, No. 3, pp. 142-156, November 2001. (Pubitemid 33046981)
15. Yesin, K.B., Nelson, B.J., "A CAD-Model Based Tracking System for Visually Guided Microassembly," Robotica, 2004.
16. Young, W.C., Budynas, R., Roark's Formulas for Stress and Strain, 7th ed., McGraw-Hill, New York, 2001.