Optimization of ion assist beam deposition of magnesium oxide template films during initial nucleation and growth

Materials Research Society Symposium Proceedings

Volumn 1254, Issue , 2010, Pages 18-23

  Groves, James R ^a   Hammond, Robert H ^b   Matias, Vladimir ^c   Stan, Liliana ^c   Depaula, Raymond F ^c   Clemens, Bruce M ^a  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ION BEAMS; IONS; MAGNESIA; OXIDE FILMS; TEXTURES;

BEAM DEPOSITION; BIAXIAL TEXTURES; BIAXIALLY TEXTURED; DEPOSITED LAYER; NUCLEATION AND GROWTH; OVERALL QUALITY; TEMPLATE LAYERS; TEXTURE DEVELOPMENT;

ION BEAM ASSISTED DEPOSITION;

EID: 84859046243     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-1254-l05-10     Document Type: Conference Paper

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